硫族化物玻璃的直接软压印

严学俭

Direct soft imprint of chalcogenide glasses

硫族化物玻璃的直接软压印

Journal of Vacuum Science & Technology B 36, 031602 (2018);

https://doi.org/10.1116/1.5023173

Dor Yehuda
  Department of Materials Engineering, Isle Katz Institute of Nanoscale Science and Technology, Ben-Gurion University of the Negev, Beer-Sheva 8410501, IsraelEviatar Kassis and Shay Joseph
  Optical Component Center, RAFAEL, Haifa 3102102, IsraelMark Schvartzmana)
  Department of Materials Engineering, Isle Katz Institute of Nanoscale Science and Technology, Ben-Gurion University of the Negev, Beer-Sheva 8410501, Israel
a)Electronic mail: marksc@bgu.ac.il

ABSTRACT
摘要

The authors explored an approach for nanostructuring of surfaces of chalcogenide glasses by direct soft nanoimprint lithography. The authors produced soft nanoimprint molds with microsized and nanosized relief features using polydimethylsiloxane. To enable the direct replication of the mold pattern on the surface of bulk chalcogenide glasses, the authors engineered a thermal imprint tool that prevents the substrate deformation using a physical confinement. The authors optimized the imprint process parameters to achieve an unprecedented full transfer micropattern onto a bulk chalcogenide glass. Furthermore, the authors explored pattern replication of nanosized structures by thermal imprint. This process paves the way for a facile and cost-effective fabrication of nanostructures on chalcogenide glasses and their numerous applications in optical and photonic devices.

        作者探索了一种适用于制备硫族化物玻璃表面的纳米结构的直接软纳米压印光刻技术。作者使用聚二甲基硅氧烷制作了具有微米化和纳米化形貌特征的软纳米压印模具。为了能够在块状硫族化物玻璃表面上直接复制模具图案，作者设计了一种热压印工具，该工具通过物理限制来防止基材变形。作者优化了压印工艺参数，以在块状硫族化物玻璃上实现前所未有的全转移微图案。此外，作者通过热压印探索了纳米化结构的图案复制性。这一工艺过程为硫族化物玻璃上的纳米结构的简捷和低成本的制造以及它们在光学和光子器件中的众多应用铺平了道路。